PPP-NCHR
Point Probe¢ç Plus Non-contact / Tappingmode with reflected coatings- High resonance frequency

ÀÌ »õ·Î¿î PointProbe¢ç Plus (PPP)´Â ¶Ù¾î³­ ´Ù¾çÇÑ ÀÀ¿ë¼º°ú ȣȯ¼ºÀ¸·Î ÀÌ¹Ì ÀÔÁõµÈ PointProbe¢ç ½Ã¸®ÁîÀÇ ÆÁ ¼±´ÜÀÇ ¸ð¾çÀ» ´õ¿í ¿Ïº®ÇÑ ±¸Á¶·Î ¼³°èÇÏ¿© ÆÁÀÇ ¹Ý°æÀ» ´õ¿í ÀÛ°Ô ÇÏ¿´°í ÆÁÀÇ ¼±´ÜÀÇ Ç°ÁúÀ» ´õ¿í ¾ÈÁ¤È­ ½ÃŲ Á¦Ç°À¸·Î Åë»óÀûÀÎ ÆÁÀÇ ¹Ý°æÀ» ±âÁ¸ PointProbe¢ç ½Ã¸®ÁîÀÇ 10 nm ÀÌÇϸ¦ 7 nm ÀÌÇÏ·Î Å©°Ô °³¼±ÇÏ¿´°í ¶ÇÇÑ ´õ¿í °³¼±µÈ ÆÁÀÇ Ç°Áú ¾ÈÁ¤À¸·Î °³¼±µÈ ÇØ»óµµ¿Í °³¼±µÈ À̹ÌÁö ÀçÇö¼ºÀ» Á¦°øÇϰí ÀÖ½À´Ï´Ù.
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Àη¸ðµå(Attractive mode)¶Ç´Â µ¿Àû¸ðµå(Dynamic mode)¶ó°íµµ ºÒ·ÁÁö´Â ºñÁ¢Ã˸ðµå(Non contact mode) ¶Ç´Â ÅÇÇθðµå(TappingTM mode) ÁÖ»ç Žħ Çö¹Ì°æ¿¡¼­´Â Æ÷ÀÎÆ® ÇÁ·Îºê¼¾¼­ PPP-NCHR(non-contact / high frequency)°¡ ÀûÇÕÇÕ´Ï´Ù. ÀÌ ¼¾¼­´Â ¶Ù¾î³­ °¨µµ¿Í ºü¸¥ ÁÖ»ç´É·ÂÀ» °¡Áö¸ç ³ôÀº µ¿ÀÛ ¾ÈÁ¤¼ºÀ» °¡Áý´Ï´Ù. ÀÌ ¼¾¼­µéÀº ±ØÈ÷ ³ôÀº ÇØ»óµµÀÇ À̹ÌÁö¸¦ ¾òÀ» ¼ö ÀÖ´Â SuperSharpSilicon(SSS) ¼¾¼­ ,°ÅÀÇ ¼öÁ÷¿¡ °¡±î¿î Ãøº®ÀÌ ÃøÁ¤°¡´ÉÇÑ High Aspect Ratio(HAR) ¼¾¼­ ±×¸®°í ´Ü´ÜÇÑ ¹°ÁúÀ» ¶Õ°Å³ª ¸¶¸ð ½ÃÇèÀ» ÇÏ´Â µî ½Ã·á¿Í ÆÁ»çÀÌ¿¡ ±ØÈ÷³ôÀº ÈûÀ» ÇÊ¿ä·Î ÇÏ´Â ¿ëµµ¿¡ ÀûÇÕÇÑ ´ÙÀ̾Ƹóµå·Î Ç¥¸é 󸮸¦ ÇÑ Diamond Coated(DT) ¼¾¼­¿Í °°Àº Ưº°ÇÑ Çü½ÄÀÇ ¼¾¼­·Îµµ °ø±Þ°¡´ÉÇÕ´Ï´Ù. ¼¾¼­¿¡ ´ëÇÑ ±â¼ú ÀÚ·á´Â ¾Æ·¡ Ç¥¿Í °°½À´Ï´Ù.Ưº°ÇÑ Ç¥¸éó¸®(ÄÚÆÃ) °¡ °¡´ÉÇÕ´Ï´Ù.
´ÙÀ½°ú °°Àº ¼¾¼­¿¡ ´ëÇÑ Ãß°¡ÀûÀΠƯ¡ÀÌ ÀÖ½À´Ï´Ù. ¡¡
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¹Ý»ç¸éÀ» ·¹ÀÌÀúºöÀÇ ¹Ý»çµµ¸¦ 2.5 Factor ±îÁö Áõ°¡½Ã۱â À§ÇÏ¿© ¾à 30 nm µÎ²²ÀÇ ¾Ë·ç¹Ì´½À¸·Î ÄÚÆÃÀ» ÇÏ¿´½À´Ï´Ù. ÀÌ·¸°Ô ÇÔÀ¸·Î¼­ ºûÀÌ ÄµÆ¼·¹¹ö³»·Î °£¼·µÇ´Â °ÍÀ» ¹æÁöÇÏ¿´½À´Ï´Ù. ÀÌ ÄÚÆÃÀº ĵƼ·¹¹ö¸¦ Á¶±Ý¹Û¿¡ ¹êµùÀ» ½ÃŰÁö ¾Ê½À´Ï´Ù. ¼öÁ÷ ¹æÇâÀ¸·Î ÈÚÀ» ¹æÁö¸¦ À§ÇÑ ÄÚÆÃÀÌ µÇ¾î ÀÖ¾î ¹êµùÀº ĵƼ·¹¹ö ±æÀÌÀÇ 2% À̳»ÀÔ´Ï´Ù.

PPP-NCHR ÇÁ·ÎºêÀÇ ¸ð¾ç°ú Ư¡

Åë»óÀûÀÎ ÆÁÀÇ ¹Ý°æÀº 10nmÀÌÇÏ(SuperSharpSiliconÀº Åë»ó 2nmÀÌÇÏ)
ÆÁ, ĵƼ·¹¹ö Ȧ´õ°¡ Çѵ¢¾î¸®·Î µÇ¾î ÀÖ´Ù.
¼¾¼­ÀÇ ÁÖ¿äÇÑ Àç·á´Â ½Ç¸®ÄÜ ´Ü°áÁ¤ÀÌ´Ù.
Àü±â(Á¤Àü) ÃæÀüÀ» ¹æÁöÇϱâ À§ÇÏ¿© µµÇÎ ³óµµ°¡ ³ô´Ù.
È­ÇÐÀûÀ¸·Î ºÒȰ¼ºÀÌ´Ù.
°í°¨µµ¸¦ À§ÇØ ³ôÀº ±â°èÀû Q-factor¸¦ °®°Ô ÇÏ¿´´Ù.

´õ ¸¹Àº Á¤º¸°¡ ÇÊ¿äÇϸé ÀϹݼ³¸í À» º¸½Ã¸é µË´Ï´Ù.

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PPP-NCHR ±â¼ú ÀÚ·á

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Typical Value

Specified Values

Thickness /¥ìm

4

3.0 - 5.0

Mean Width /¥ìm

30

22.5 - 37.5

Length /¥ìm

125

115 - 135

Force Constant /(N/m)

42

10 - 130

Resonance Frequency /kHz

330

204 - 497


125¥ìm¸¦ ³Ñ´Â ĵƼ·¹¹ö¸¦ ¿ä±¸ÇÏ´Â ÀÀ¿ëºÐ¾ß¸¦ À§ÇØ Æ÷ÀÎÆ®ÇÁ·Îºê PPP-NCL ¸¦ »ç¿ëÇÏ¸é µË´Ï´Ù.

´õ ¸¹Àº Á¤º¸°¡ ÇÊ¿äÇϸé ÀϹݼ³¸í , SuperSharpSilicon ¼¾¼­ ÀÇ ¼³¸í, High Aspect Ratio ¼¾¼­ ÀÇ ¼³¸í, ±×¸®°í Diamond Coated ¼¾¼­ ÀÇ ¼³¸íÀ» Âü°íÇÏ½Ã¸é µË´Ï´Ù.


PPP-NCHR ÁÖ¹®ÄÚµå ,Æ÷Àå´ÜÀ§, ÄÚÆÃ

PPP-NCHR ¼¾¼­´Â ´ÙÀ½ ÇüÅÂÀÇ ¼±Àû ´ÜÀ§°¡ ÀÖ½À´Ï´Ù. ¶ÇÇÑ ¼±Åûç¾çÀ¸·Î ĵƼ·¹¹öÀÇ ¹Ý»ç¸é¿¡ ÄÚÆÃÀ» ÇÏÁö ¾ÊÀº ¼¾¼­¿Í Àüü¸¦ PtIr5ÄÚÆÃ À» ÇÑ °Íµµ À¯¿ëÇÕ´Ï´Ù.

ÁÖ¹® ÄÚµå Æ÷Àå´ÜÀ§ Data Sheet ÄÚÆÃ
PPP-NCHR-10#

10

¸ðµç ¼¾¼­ ¹Ý»ç¸é
PPP-NCHR-20#

20

¸ðµç ¼¾¼­ ¹Ý»ç¸é
PPP-NCHR-50

50

¾øÀ½ ¹Ý»ç¸é
PPP-NCHR-W*

> 380

32°³ ¼¾¼­ ¹Ý»ç¸é

NANOSENSORS / POINTPROBE¢ç´Â NanoWorld AG ÀÇ µî·Ï»óÇ¥ÀÔ´Ï´Ù.